"MEMS stands for micro-electromechanical technology.
MEMS technology has been outstandingly successful in the physical sensing context and has yielded a range of small, rugged and inexpensive devices such as accelerometers, strain gauges, microphones, air mass flow sensors, pressure sensors and more recently gyroscopes and yaw-rate sensors. Some have been developed to meet the demanding needs of the automotive industry and are used in their millions in engine management systems, to trigger air bags and in anti-rollover, vehicle stability control and GPS navigation systems. The attached report identifies the early research which led to the development of MEMS sensors. It considers subsequent applications of MEMS to physical, gas and chemical sensing and discusses recent technological innovations." |